Assessing Measurement Noise Effect in Run-to-Run Process Control: Extends EWMA Controller by Kalman Filter
Recently, the Exponentially Weighted Moving Average (EWMA) controller has become a popular control method in Run-to-Run (RtR) process control, but the issue of measurement noise from metrology elliot pecan tree for sale tools has not been addressed in RtR EWMA controllers yet.This paper utilizes a Kalman Filter (KF) controller to deal with measurem